Marcus, R. B., & Sheng, T. T. (1983). Transmission electron microscopy of silicon VLSI circuits and structures. John Wiley.
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Chicago Style (17th ed.) Citation
Marcus, Robert B., and Tan Tsu Sheng. Transmission Electron Microscopy of Silicon VLSI Circuits and Structures. New York: John Wiley, 1983.
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MLA (9th ed.) Citation
Marcus, Robert B., and Tan Tsu Sheng. Transmission Electron Microscopy of Silicon VLSI Circuits and Structures. John Wiley, 1983.
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Warning: These citations may not always be 100% accurate.