APA (7th ed.) Citation
Bowen, D., & Tanner, B. K. (2006). X-Ray Metrology in Semiconductor Manufactoring. CRC Press.
Chicago Style (17th ed.) Citation
Bowen, D.Keitn, and Brian K. Tanner. X-Ray Metrology in Semiconductor Manufactoring. Boca Raton: CRC Press, 2006.
MLA (9th ed.) Citation
Bowen, D.Keitn, and Brian K. Tanner. X-Ray Metrology in Semiconductor Manufactoring. CRC Press, 2006.
Warning: These citations may not always be 100% accurate.