Townsend, P., Kelly, J., & Hartley, N. (1976). Ion Implantation, sputtering and their applications. Academic Press.
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Chicago Style (17th ed.) Citation
Townsend, P.D, J.C Kelly, and N.E.W Hartley. Ion Implantation, Sputtering and Their Applications. London: Academic Press, 1976.
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MLA (9th ed.) Citation
Townsend, P.D, et al. Ion Implantation, Sputtering and Their Applications. Academic Press, 1976.
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Warning: These citations may not always be 100% accurate.