Erlich, D. a. o. (1989). Laser microfabrication. Thin film processes and lithography. Academic Press.
Successfully copied to clipboard
Copying to clipboard failed
Chicago Style (17th ed.) Citation
Erlich, D.J. and o. Laser Microfabrication. Thin Film Processes and Lithography. Boston: Academic Press, 1989.
Successfully copied to clipboard
Copying to clipboard failed
MLA (9th ed.) Citation
Erlich, D.J. and o. Laser Microfabrication. Thin Film Processes and Lithography. Academic Press, 1989.
Successfully copied to clipboard
Copying to clipboard failed
Warning: These citations may not always be 100% accurate.