Moreau, W. (1988). Semiconductor lithography. Principles practices and materials. Plenum Press.
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Citação norma Chicago
Moreau, W.M. Semiconductor Lithography. Principles Practices and Materials. New York: Plenum Press, 1988.
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Citação norma MLA
Moreau, W.M. Semiconductor Lithography. Principles Practices and Materials. Plenum Press, 1988.
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Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.