APA (7th ed.) Citation
Maly, W. (1987). Atlas of IC technologies: An introduction of VLSI processes. The Benjamin/Cummings Publ.Comp.
Chicago Style (17th ed.) Citation
Maly, W. Atlas of IC Technologies: An Introduction of VLSI Processes. Menlo Park: The Benjamin/Cummings Publ.Comp, 1987.
MLA (9th ed.) Citation
Maly, W. Atlas of IC Technologies: An Introduction of VLSI Processes. The Benjamin/Cummings Publ.Comp, 1987.
Warning: These citations may not always be 100% accurate.