Rossnagel, S. M. (1989). Handbook of plasma processing technology: Fundamentals, etching, deposition and surface interactions (1.vyd.). Noyes Publications.
Successfully copied to clipboard
Copying to clipboard failed
Citação norma Chicago
Rossnagel, Stephen M. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions. 1.vyd. Park Ridge: Noyes Publications, 1989.
Successfully copied to clipboard
Copying to clipboard failed
Citação norma MLA
Rossnagel, Stephen M. Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions. 1.vyd. Noyes Publications, 1989.
Successfully copied to clipboard
Copying to clipboard failed
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.