APA (7th ed.) Citation
Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication (1.vyd.). McGraw-Hill.
Chicago Style (17th ed.) Citation
Middleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. 1.vyd. New York: McGraw-Hill, 1993.
MLA (9th ed.) Citation
Middleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. 1.vyd. McGraw-Hill, 1993.
Warning: These citations may not always be 100% accurate.