Introduction to microlithography /

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Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Format: Book
Language:English
Published: Washington, DC American Chemical Society 1994.
Edition:2nd ed.
Series:ACS professional reference book
Subjects:
Microlithography > Congresses.
Photoresists > Congresses.
Plasma etching > Congresses.
Semiconductors > Etching > Congresses.
Online Access:View in OPAC
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Table of Contents:
  • An introduction to lithography / Larry F. Thompson
  • The lithographic process / Murrae J. Bowden
  • Organic resist materials / C. Grant Willson
  • Resist processing / Larry Thompson
  • Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.

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