Journal of Microelectromechanical Systems

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Bibliographic Details
Format: Serial
Published: 2000
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773 0 |t Journal of Microelectromechanical Systems :  |w stu_us_cat*stu59980  |x 1057-7157  |7 nnas 
996 |d Vol. 9, 2000  |v Vol. 9  |y 2000  |l EE0103  |s A  |a 24  |w stu62421_0001