Sputtering by particle bombardment 1 : Physical sputtering of single -element solids /

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Bibliographic Details
Other Authors: Behrisch, R. (Compiler)
Format: Book
Language:English
Published: Berlin : Springer Verlag, 1981
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245 1 |a Sputtering by particle bombardment 1 :  |b Physical sputtering of single -element solids /  |c Ed.: Behrich, R. 
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